Micro Computed Tomography (µCT) designs scans with a measured spatial resolution (BSR, MTF or LSF) between 2 µm and 50 µm. Many µCT scanners are operated at Fraunhofer EZRT for materials characterization and/or for CT metrology. They all include micro-focal anodes, typically with variable high voltage and spot size. Scan times range between 1 min and 2 h are typical. Geometric magnification is adjusted continuously between 50x and 2x. Flatpanel detectors (FPDs) with pixel sizes between 50 µm and 200 µm are routinely used; some scanners comprise CCD detectors with even smaller pixels (e.g. 9 µm or 24 µm).